188宝金博页面版

第 15 卷第 4 期 粉末冶金材料科学与工程 2010 年 8 月 Vol.15 No.4 Materials Science and Engineering of Powder Metallurgy Aug. 2010 稀土−硼共渗预处理对 YG6 表面金刚石薄膜质量的影响 魏秋平1, 2 ，刘培植 1 ，余志明 1, 2 ，马 莉 2 ，龙航宇 1 ，苏绍华 1 (1. 中南大学 材料科学与工程学院，长沙 410083; 2. 中南大学 粉末冶金国家重点实验室，长沙 410083) 摘 要：分别对 YG6(WC-wt.6%.Co)硬质合金基体表面进行常规固态渗硼和固态稀土(CeO 2 )共渗处理，再以甲烷和氢气为反应气体，采用热丝化学气相沉积法在合金基体表面沉积金刚石膜，通过调控灯丝功率和进气总流量制备微米晶或纳米晶金刚石膜。利用场发射扫描电镜、X 射线衍射仪、激光拉曼光谱仪和洛氏硬度计对渗硼基体和金刚石膜进行检测分析，研究 YG6 硬质合金基体稀土硼共渗与常规固态渗硼处理对微米晶金刚石膜与纳米晶金刚石膜的物相组成、结构形貌和附着性能的影响。结果表明，与常规固态渗硼处理相比，稀土(CeO 2 )硼共渗样品表面残留物较少，沉积的金刚石膜样品表面粗糙度低，在 1 000 N 载荷下薄膜无剥落现象，表现出较好的附着性能；纳米晶金刚石膜的生长速率低于微米晶金刚石膜，但其附着性能明显优于微米晶金刚石膜。 关键词：金刚石膜；硬质合金；纳米晶；渗硼处理；附着性能 中图分类号：TG135.5 文献标识码：A 文章编号：1673-0224(2010)4-331-07 Effects of CeO 2 and B co-infiltration pretreatment on the quality of diamond films deposited on cemented carbide WEI Qiu-ping 1, 2 , LIU Pei-zhi 1 , YU Zhi-ming 1, 2 , MA Li 2 , LONG Hang-yu 1 , SU Shao-hua 1 (1. School of Materials Science and Engineering, Central South University, Changsha 410083, China; 2. State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China) Abstract: CeO 2 and B co-infiltration was performed on the surface of YG6(WC-6%Co) cemented carbide firstly, then diamond films were deposited on the pretreatment WC-6%Co substrate surface through hot filament chemical vapor deposition method using methane and hydrogen as reactive gases. The micro/nano crystalline diamond films were obtained by controlling filament power and total reactive gases flow. And the substrates and diamond films were measured by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. The effects of the normal solid B infiltration and CeO 2 -B co-infiltration pretreatment on the phases composition，morphology and adhesion between the diamond films and substrates were investigated. Compared with normal solid B infiltration, on CeO 2 -B substrate surface, residues are less and the diamond films exhibit smoother surface morphology and better adhesion under a loading of 1 000 N. The growth rate of nano-crystalline diamond films is slower than that of micro-crystalline diamond films, but the adhesion between the nano-crystalline diamond films and substrates is better. Key words: diamond films; cemented carbide; nano-crystalline;B infiltration; adhesion 金刚石集高硬度、高耐磨性、高热导率、低摩擦因数、低热膨胀系数和良好的化学稳定性等优异性能于一体 [1] 。金刚石涂层工具市场潜力巨大，用于加工非铁合金和硬脆非金属材料 (如陶瓷、石墨、纤维或颗粒增强塑料等) [2] 。化学气相沉积(CVD)法可使金刚石膜直接生长在基体表面，可用于涂覆形状复杂的工具。相对于其他形式的金刚石工具，在商业应用方面CVD 金刚石膜涂层工具具有适用范围广、性价比高的 基金项目：粉末冶金国家重点实验室开放基金资助项目(2008112048)；湖南省研究生创新基金资助项目(1343-74236000005)；中南大学贵重仪器开放共享基金资助项目(ZKJ2008001)；中南大学优秀博士论文扶持基金资助项目(2008yb015) 收稿日期：2009-10-09；修订日期：2009-01-08 通讯作者：余志明，教授，博士。电话：0731-88830335；E-mail：zhiming@mail.csu.edu.cn