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188宝金博页面版: Physical studies of quartz crystal sorption detectors

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内容提示: Sensors and Actuators, 3 (1982183) 63 - 77 63 PHYSICAL STUDIES OF QUARTZ CRYSTAL SORPTION DETECTORS AL F K INDL UND and INGE MAR L UNDSTR OM L aboratory of Applzed Physzcs, Department of Physzcs and Measurement T echnology, L znkopzng Znstztute of T echnology, S-581 83 L znkopzng (Sweden) (R ecezved December 12, 1981 ,m revzsed form J une 9, 1982, accepted J une 23, 1982) Abstract We have mvestlgated quartz crystals coated with a slhcone 011 These crystals serve as fast and reliable detectors for (halogena...

文档格式:PDF | 页数:15 | 浏览次数:29 | 上传日期:2015-12-10 12:40:43 | 文档星级:
Sensors and Actuators, 3 (1982183) 63 - 77 63 PHYSICAL STUDIES OF QUARTZ CRYSTAL SORPTION DETECTORS AL F K INDL UND and INGE MAR L UNDSTR OM L aboratory of Applzed Physzcs, Department of Physzcs and Measurement T echnology, L znkopzng Znstztute of T echnology, S-581 83 L znkopzng (Sweden) (R ecezved December 12, 1981 ,m revzsed form J une 9, 1982, accepted J une 23, 1982) Abstract We have mvestlgated quartz crystals coated with a slhcone 011 These crystals serve as fast and reliable detectors for (halogenated) hydrocarbons The paper desclnbes some physical properties of the slhcone 011 with respect to the absorption and desorptlon of molecules like halothane and other hydrocarbons The temperature dependence of the steady-state fre- quency shifts indicates that the absorption process m the s&cone 0111s exo- thermlc, wrth an absorption energy around 0 3 - 0 4 eV/molecule The absorption and desorptlon kmetlcs, which were studled m some detal, show that the time constants for absorption and desorptlon are about equal Typical time constants at room temperature are about 100 ms The thickness dependence of the time constants mdlcates dlffuslon-limited processes m the silicone 011 The Influence of water vapour and of gas flow rates on the ob- served frequency shifts was also investigated 1. Introduction Most apphcatlons of the so-called quartz crystal sorption detector deal with the measurements of very small concentrations of atmosphenc pollutants f 1 - 51 In these apphcatlons the large theoretical sensltlvlty of sorption detectors 1s the most interesting parameter Problems anse here con- cerning the stability of the sensmg layer put on the quartz crystal surface and mterference with unwanted gases Furthermore, m some cases, when a thick sensing layer has to be apphed to the crystal to achieve a large sensltlv- lty, there can be some difficulty m keepmg the crystal osclllatmg For some practical apphcatlons, such as m process control or m the medical field (e g , U-I anaesthesla [6, 7, 8]), the requirements on the sorption detector are quite different In these apphcatlons the detector should have a fast, reversible and stable long-term response We have therefore performed some studies on quartz crystals covered with layers based on slhcone O&S, with these requirements m mind 0250-6874/82/0000-0000/$02 75 @ E lsevzer Sequoza/Prznted zn T he Netherlands

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