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SEMI E4-0699 © SEMI 1980, 1999 1SEMI E4-0699SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGETRANSFER (SECS-I)This standard was technically approved by the Global Information & Control Committee and is the directresponsibility of the North American Information & Control Committee. Current edition approved by theNorth American Regional Standards Committee on February 28, 1999. Initially available at www.semi.orgMay 1999; to be published June 1999. Originally published in 1980; previously published January 1999.1 Introduction1.1 Revision History — This is the first major revisionsince the original release of SECS-I in 1980. Very littleof the original intent of SECS-I has been altered,although there are a few significant additions. Thechanges are summarized in Appendix 1. Thisspecification has been developed in cooperation withthe Japan Electronic Industry Development AssociationCommittee 12 on Equipment Communications.1.2 Scope — The SECS-I standard defines acommunication interface suitable for the exchange ofmessages between semiconductor processing equipmentand a host. Semiconductor processing equipmentincludes equipment intended for wafer manufacturing,wafer processing, process measuring, assembly andpackaging. A host is a computer or network ofcomputers which exchange information with theequipment to accomplish manufacturing. This standardincludes the description of the physical connector,signal levels, data rate and logical protocols required toexchange messages between the host and equipmentover a serial point-to-point data path. This standarddoes not define the data contained within a message.The meaning of messages must be determined throughsome message content standard such as SEMIEquipment Communications Standard E5 (SECS-II).1.3 Intent — This standard provides a means forindependent manufacturers to produce equipmentand/or hosts which can be connected without requiringspecific knowledge of each other.1.3.1 Layered Protocol — The SECS-I protocol canbe thought of as a layered protocol used for point-to-point communication. The levels within SECS-I are thephysical link, block transfer protocol, and messageprotocol. (See Related Information R1-1.1.)1.3.2 Speed — It is not the intent of this standard tomeet the communication needs of all possibleapplications. For example, the speed of RS-232 may beinsufficient to meet the needs of transferring massamounts of data or programs in a short period of time,such as might be required by high speed functional testapplications.1.3.3 Network Support — The method by whichblocks of data are routed to a piece of equipment or findtheir way back to the proper host application is notspecified by SECS-I. In a network, the roles of host andequipment might be assumed by any party in thenetwork. In this situation, one end of thecommunications link must assume the role of theequipment and the other the role of the host.1.4 Applicable Documents1.4.1 Electronics Industries Association Standards 1EIA RS-232-C — Interface between Data TerminalEquipment and Data Communication EquipmentEmploying Serial Binary Data InterchangeEIA RS-269-B — Synchronous Signaling Rates forData TransmissionEIA RS-334 — Signal Quality at Interface BetweenData Processing Terminal Equipment and SynchronousCommunication Equipment for Serial DataTransmissionEIA RS-422 — Electrical Characteristics of BalancedVoltage Digital Interface CircuitsEIA RS-423 — Electrical Characteristics ofUnbalanced Voltage Digital Interface Circuits1.4.2 European Computer Manufacturing Association 2ECMA/TC24/82/18 — "Network Layer Principles,"Final Draft (April, 1982)1.4.3 Japanese Industrial Standards Committees 3JIS C 6361 — "The Interface between Data CircuitTerminating Equipment (DCE) and Data TerminalEquipment (DTE) (25-pin Interface)"1.4.4 International Organization for Standardization 4 1 EIA Engineering Department, Standards Sales Office, 2001 EyeStreet, N.W., Washington, D.C. 200062 European Computer Manufacturing Association, 114 Rue du Rhone,1204 Geneva, Switzerland3 Japanese Standards Association, 1-24, Akasaka 4 Chome, Minato-ku, Tokyo 107, Japan4 ANSI, 1430 Broadway, New York, NY 10018